PropertyValue
nif:beginIndex
  • 0 (xsd:integer)
nif:broaderContext
nif:endIndex
  • 148 (xsd:integer)
nif:isString
  • After alignment of both system halves (in mask aligner EVG 620 from EV Group, St. Florian am Inn, Austria) a pre-bonding force was applied manually.
rdf:type