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After ablation, the system halves were cleaned in an ultrasonic bath filled with ethanol for 15 min, then immersed for 0.5 min in a solution of 45 ml HO, 100 ml HPO, and 30 ml hydrofluoric acid and finally subjected to cleaning in a spray processor unit (Fairchild Convac, Neuenstadt, Germany) using distilled water and a mixture of HSO and HO.
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