The structuring of glass (700 µm-thick BOROFLOAT substrates from Schott AG, Mainz, Germany) was carried out in a laser workstation (Microstruct-C from 3D-Micromac, Germany) equipped with femtosecond YB:KGW laser (Pharos from Light Conversion, Vilnius, Lithuania) operated at the fundamental wavelength of 1030 nm.
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