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  • The system mainly contains a broadband light source (LED illuminant enveloped by Gaussian function whose central wavelength is 560 nm and whose bandwidth is 160 nm), a CCD camera that contains 768 × 576 pixels with a resolution of 6.25 × 6.5 μm, a Mirau interferoscope (50×, NA = 0.55, DOF = 900 nm) produced by the Nikon Company (Tokyo, Japan), a PZT scanning stage (with a resolution of 1.0 nm and a scanning range of 20.0 μm, produced by PI Ceramic Co., Lederhose, Germany), and self-designed imaging components.
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