sentence32
at
SoMeSci
http://data.gesis.org/somesci/PMC5579545/sentence32
Property
Value
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0
(xsd:integer)
nif:
broaderContext
sms:
PMC5579545
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94
(xsd:integer)
nif:
isString
The frond side of Si was removed by wet etching to form thermal isolation in the microchamber.
rdf:
type
nif:
Context
nif:
OffsetBasedString
nif:
Sentence
![[This page as RDF]](http://data.gesis.org/somesci/static/rdf-icon.gif){kind=icon}