PropertyValue
nif:beginIndex
  • 0 (xsd:integer)
nif:broaderContext
nif:endIndex
  • 215 (xsd:integer)
nif:isString
  • However, MEMS-based accelerometers based on the proof-mass system suffer from problems such as electromagnetic interference (EMI), the effect of parasitic electrostatic force, and fabrication complexity [5,6,7,8,9].
rdf:type